Virtus Chief Scientist Dr. Mark Boysel will give a talk at SEMICON JAPAN 2008's "SEMI Technology Symposium" in Makuhari Messe, Japan.
SEMI Technology Symposium (STS) began in 1982 as an annual symposium on semiconductor technology. STS serves as a forum to exchange recent trends, issues and technological innovations in semiconductor industry, providing an opportunity for semiconductor and material manufacturers to share information.
Dr. Boysel will report on the development of a Silicon-On-Insulator (SOI) MEMS motion sensor which can detect acceleration along three axes and angular velocity around two or three axes using a single proof mass. The fabrication and packaging process for the sensor, as well as the performance data will be presented at the symposium.