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Technology
Intellectual Property
MEMS
Sensors
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Intellectual Property

Virtus Advanced Sensors differs from ordinary sensor companies on a number of points.  Virtus maintain a large global patent portfolio of MEMS sensor technology.  Virtus also stands on solid stable ground when it comes to inertial sensors with a proven track record.   

Key Points of Virtus Sensor Technology:

  1. 3-axis MEMS Accelerometer Technology (single proof mass)
  2. 3-axis MEMS Gyro Technology (single proof mass)
  3. Full 6-axis MEMS inertia sensor Technology (single proof mass)
  4. Piezo-resistive, piezo-electric, and capacitive sensing technology


Other sensor companies who make multi-axis accelerometers and gyros usually have designs where each axis uses a separate device, i.e. a separate proof mass.   For example, to sense in the y direction and x direction, the other sensor companies use 1 proof mass for each axis thus doubling the precious amount of area that is used.  Virtus, however,  holds key technology to measure all 3 axes using a single proof mass, thus reducing silicon area and keeping the sensors inexpensive.

Finally, Virtus holds key technologies which enable both 3-axis accelerations and 3-axis angular velocities to be measured all with the same proof mass.   Thus, you no longer need to look for multi-module solutions for a fully integrated, 6-axis inertial measure unit (IMU).  With Virtus’ technology, a full IMU can be fabricated using a single MEMS proof mass all with integrated electronics to bring the customer unparalled performance in a single chip.