Sensors are devices that provide us information from the outside environment. Sensors have become increasingly pervasive throughout society as their size and cost have been reduced and performance enhanced. MEMS have become a key enabling technology to achieve the above.
In general, MEMS is a technology that combines computers with tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators embedded in semiconductor chips. After decades of development, this “foundational technology of the next decade” has entered the first real stage of mass commercialization and promises to help revolutionize a number of high tech sectors.
Virtus Advanced Sensors takes advantage of MEMS related processing to deliver unparalleled performance in the areas of inertial sensors, which include accelerometers and gyros.
Below is a list of Virtus’ patented device technologies:
- 3-axis MEMS accelerometer technology (single proof mass)
- 3-axis MEMS gyro technology (single proof mass)
- 5 and 6-axis MEMS inertia sensor technology (single proof mass)
- Piezo-resistive, piezo-electric, and capacitive sensing technology
- Vacuum package technology (high sensitivity)