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Technology
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MEMS
Sensors
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Sensors

Sensors are devices that provide us information from the outside environment.  Sensors have become increasingly pervasive throughout society as their size and cost have been reduced and performance enhanced.  MEMS have become a key enabling technology to achieve the above.

In general, MEMS is a technology that combines computers with tiny mechanical devices such as sensors, valves, gears, mirrors, and actuators embedded in semiconductor chips.   After decades of development, this “foundational technology of the next decade” has entered the first real stage of mass commercialization and promises to help revolutionize a number of high tech sectors.

Virtus Advanced Sensors takes advantage of MEMS related processing to deliver unparalleled performance in the areas of inertial sensors, which include accelerometers and gyros. 
Below is a list of Virtus’ patented device technologies:

  • 3-axis MEMS accelerometer technology (single proof mass)
  • 3-axis MEMS gyro technology (single proof mass)
  • 5 and 6-axis MEMS inertia sensor technology (single proof mass)
  • Piezo-resistive, piezo-electric, and capacitive sensing technology
  • Vacuum package technology (high sensitivity)
Inertial sensors can be used to measure movement for a number of applications. Inertial sensors can be classified as accelerometers, gyros or inertial measure units (IMU, a combination of both accelerometers and gyros).


While most companies seek to make a full axis motion sensor using a module composed of individual sensors for each particular axis, Virtus’ design allows it to measure multiple axes with a single device.